quartz glass wafer boat

Quartz Glass Wafer Boat – High-Purity Wafer Handling for Precision Applications

Our Quartz Glass Wafer Boats are expertly engineered to meet the demanding requirements of semiconductor processing, laboratory research, and high-temperature thermal applications. Designed for the safe and stable support of silicon wafers, these wafer boats are essential components in processes such as oxidation, diffusion, LPCVD, and annealing.

Material Excellence – High-Purity Quartz Glass

Each wafer boat is manufactured using high-purity quartz glass (fused silica, SiO₂), offering excellent thermal resistance, chemical stability, and ultra-low impurity levels. Quartz glass can withstand temperatures exceeding 1000°C without deformation or structural failure, making it ideal for use in cleanroom environments and high-temperature furnaces.

The material is inert to most chemicals, including acids and reactive gases, and has a very low coefficient of thermal expansion, reducing the risk of cracking or contamination. This ensures consistent performance and maximum protection of your wafers during critical process steps.

Applications Across Industries

Quartz glass wafer boats are widely used in:

Semiconductor Manufacturing: For holding wafers during oxidation, diffusion, and annealing.
Microelectronics and MEMS R&D: In university labs and advanced research facilities.
Photovoltaics and LED Production: Supporting wafer processing in solar cell and optoelectronics fabrication.
Wafer Cleaning and Storage: Maintaining wafer integrity between process steps.

Whether in mass production or experimental research, our wafer boats provide reliable wafer support with minimal contamination risk.

Available Sizes

We offer quartz wafer boats in standard sizes to accommodate various wafer diameters:

3-inch (76.2 mm)
4-inch (100 mm)
8-inch (200 mm)

Each size is available in vertical or horizontal configurations and can be customized based on slot spacing, wafer count, and boat geometry to match your equipment or process needs.

Key Features

Precision-Machined Slots for accurate wafer positioning
Smooth, Polished Surfaces to reduce particle generation and prevent wafer damage
Strong Structural Design to ensure mechanical integrity at high temperatures
Cleanroom Manufacturing to meet semiconductor-grade purity standards

Why Choose Us?

High Quality & Consistency: Rigorous quality control ensures every product meets industry standards.
Customization Available: We offer custom designs to fit your unique process requirements.
Technical Support: Our experienced team is ready to assist with product selection and application guidance.
Fast Delivery: Standard sizes are available for quick shipment to keep your operations moving.

Trust our Quartz Glass Wafer Boats to deliver the purity, durability, and performance your high-tech processes demand. Contact us today for product details, technical specifications, or a custom quote.